Mgr. Peter Klein, Ph.D.

Výzkumný pracovník II, Deposition of Thin films and Nanostructures

Correspondence Address:
Kotlářská 267/2, 611 37 Brno

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Basic information

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Publications

Type

Total number of publications: 89

2021

Time-resolved sputtered species number density in Ar/N2 HiPIMS

BERNÁTOVÁ Katarína KLEIN Peter FEKETE Matej HNILICA Jaroslav VAŠINA Petr

Appeared in Conference without Proceedings

Year: 2021, type: Appeared in Conference without Proceedings

2020

Behaviour of spokes in reactive HiPIMS

KLEIN Peter HNILICA Jaroslav FEKETE Matej ŠLAPANSKÁ Marta VAŠINA Petr

Conference abstract

Year: 2020, type: Conference abstract
Effect of nitrogen on sputtered species number densities evolution in reactive HiPIMS

BERNÁTOVÁ Katarína FEKETE Matej KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Conference abstract

Year: 2020, type: Conference abstract
Evolution of ionization fraction of sputtered species in standard, multi-pulse and reactive HiPIMS

VAŠINA Petr FEKETE Matej BERNÁTOVÁ Katarína KLEIN Peter HNILICA Jaroslav

Conference abstract

Year: 2020, type: Conference abstract
Influence of sputtered species ionisation on the hysteresis behaviour of reactive HiPIMS with oxygen admixture

FEKETE Matej BERNÁTOVÁ Katarína KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Article in Periodical

Plasma Sources Science and Technology, year: 2020, volume: 29, edition: 2, DOI
Ionisation fractions of sputtered titanium species at target and substrate region in HiPIMS

BERNÁTOVÁ Katarína FEKETE Matej KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Article in Periodical

Plasma Sources Science and Technology, year: 2020, volume: 29, edition: 5, DOI
Ionised density fraction of sputtered species in HiPIMS discharge excited in argon/acetylene gas mixture

FEKETE Matej BERNÁTOVÁ Katarína HNILICA Jaroslav SOUČEK Pavel KLEIN Peter VAŠINA Petr

Conference abstract

Year: 2020, type: Conference abstract
Revisiting particle dynamics in HiPIMS discharges. I. General effects

HNILICA Jaroslav KLEIN Peter VAŠINA Petr SNYDERS Rony BRITUN Nikolay

Article in Periodical

Journal of applied physics, year: 2020, volume: 128, edition: 4, DOI
Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects

HNILICA Jaroslav KLEIN Peter VAŠINA Petr SNYDERS Rony BRITUN Nikolay

Article in Periodical

Journal of Applied Physics, year: 2020, volume: 128, edition: 4, DOI
Sputtered titanium species dynamics in HiPIMS

HNILICA Jaroslav BRITUN Nikolay KLEIN Peter SNYDERS Rony VAŠINA Petr

Conference abstract

Year: 2020, type: Conference abstract

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